Brooks-instrument Mfi Series Manual de usuario descargar pdf (Pagina 62)

4-24

Brooks

Mf Series

Section 4 Maintenance &

Troubleshooting

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

Figure 4-4 Model Mf51/61 Restrictor Element Assembly

5. Install the inlet adapter fitting and O-ring.

6. Recalibration of the controller or meter should be considered in order to

maintain correct accuracy.

Table 4-7 Model Mf51/61 Restrictor Selection Guide

Full Scale Range Restrictor

slpm Nitrogen Element

Equivalent Flow* Combination Part Number

4.6 to 15 1-40 micron (1 inch) S613E604BMT

15 to 26 1-40 micron S613E636BMT

26 to 42 2-40 micron S613E523BMT

42 to 60 3-40 micron S613E526BMT

60 to 79 2-40 micron/1-60 micron S613E528BMT

79 to 93 1-40 micron/2-60 micron S613E529BMT

93 to 130** 3-60 micron S613E527BMT

*Based on 0°C Standard Reference Temperature

**For Hydrogen from 130 slpm to 200 slpm use 3-60 micron restrictor elements.

Note: If the nitrogen equivalent flow is between two sizes, select the larger size.

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Brooks-instrument Mfi Series Manual de usuario Pagina 62