Brooks-instrument Mfi Series Manual de usuario descargar pdf (Pagina 16)

1-8

Brooks

Mf Series

Section 1 Introduction

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

Figure 1-7 Model Mf53 Controller Dimensions

Figure 1-8 Model Mf53 Controller with Flange Dimensions

Connections "A" Dim.

1/2" Tube Compr. 11.96/303.8

3/4" Tube Compr. 11.96/303.8

1" Tube Compr. 12.31/312.8

1/2" VCO 10.86/275.8

3/4" VCO 11.57/293.8

1/2" VCR 11.17/283.8

0.5", 0.1", 1.5" NPT or

1-1/16"-12 9.28/235.8

Dimensions in inches/mm

Flange Class

DIN DN14 PN 40

DIN DN25 PN 40

DIN DN40 PN 40

DIN DN50 PN 40

ANSI 0.5" 150 LBS

ANSI 0.5" 300 LBS

ANSI 1" 150 LBS

ANSI 1" 300 LBS

ANSI 1.5" 150 LBS

ANSI 1.5" 300 LBS

ANSI 2" 150 LBS

ANSI 2" 300 LBS

Dimensions in inches/mm

1 2 ... 11 12 13 14 15 16 17 18 19 20 21 ... 81 82

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Brooks-instrument Mfi Series Manual de usuario Pagina 16